Product Information
| Item Type | Product Type | Max Working Temperature | Specifications | |
| Customized Type Furnace | *Box type Furnace, tube furnace, Elevator type furnace, cylinder type furnace etc., | Customized | Customized | |
| Standard Type Furnace | *Box type Furnace | Customized | Customized | |
| Repair The Heating Chamber Of Diffusion Furnace Used In Semiconductor Industry | *VOS-56-101(P), VOS-56-003, VOS-56-002 ,VOS-40-017type MoSi2 heating elements and Refractory Repair | / | / | |
Customized Type Furnace
* Advantage About The Customized Type
1. Heating Elements: With own brand “YTTORCH “ High quality MoSi2 Heating elements. High Cost-effective.
(1) TC1700,TC1800,MR1800,TC1850,TC1900,Five types whice can meet the different
(2) requirments about the furnace working temperature.
(3) The Max furnace working temperature can reach 1800 ° C .
2.Heating Chamber: The Heating Chamber is made of th light weight ceramic fibre Refractory and MoSi2 Heating elements.
(1) It can be specially used in scientific research laboratories, furnace manufacturers and heater
(2) manufacturers with high requirements of compactness, rapid heating, precise heating profile and precise control.
(3) The varies shape heating Chamber can be customized according to customer requirements.
3.Excellent cylindrical furnace manufacturing technology:
(1) In ylindrical and semi-cylindrical chambers, the MoSi2 U-shaped hooks will hold the MoSi2 heating elements and fixed it on the ceramic fiber Refractory
(2) which can achieve high furnace working temperature. The electrical contact is attached to the module and can be connected at any time.
(3) Each heating module can be individually controlled to ensure consistent temperature lines, and rapid and accurate temperature rise.
(4) The electrical contact is attached to the module and can be connected at any time. Each heating module can be individually controlled to ensure
(5) consistent temperature lines, rapid and accurate temperature rise.
(6) It can meet the needs of high-tech manufacturing industries, such as semiconductor, photovoltaic and optical fiber, for high-quality heat treatment
(7) temperature field. The furnace temperature can reach 1000 ° C-1600 ° C;with high clean heating space; provide uniform heat environment.
4.Excellent Furnace top part manufacturing technology.
5.Special thermocouple for aero-engine temperature measurement
6.Standard chassis control power supply, independent control cabinet, integrated control power supply
7.Main control instrument: the brand specified by the customer or
our own brand “YTTORCH”( temperature control, temperature record, voltage and current display and record function)
Conventional electric furnace
| Model | TC-1515A | TC-2025A | TC-2035A | TC-2045A | TC-3035A | TC-3045A | TC-3050A | TC-4050A | |
| TC-1515B | TC-2025B | TC-2035B | TC-2045B | TC-3035B | TC-3045B | TC-3050B | TC-4050B | ||
| Hormal operation temp | A Series:1500℃ | B Series:1600℃ | |||||||
| Max operation temp | A Series:1600℃ | B Series:1700℃ | |||||||
| Temp distribution | About±3℃(effective heating area,normal temperature,empty furnace) | ||||||||
| Heat time/temperature | A | 60分/1500℃ | 3Hour/1500℃ | ||||||
| B | 60分/1600℃ | 4Hour/1600℃ | |||||||
| Atmosphere | Atmospheric environment(various atmosphere furnaces can be customized according to user needs) | ||||||||
| Inside dimensions | W | 150 | 200 | 200 | 200 | 300 | 300 | 300 | 400 |
| H | 150 | 200 | 200 | 200 | 300 | 300 | 300 | 400 | |
| D | 105 | 250 | 350 | 450 | 350 | 450 | 500 | 500 | |
| Heater | Molybdenumdisilicide heating element(MoSi2) | ||||||||
| Funace capacity | A | 4kw | 5.5kw | 7kw | 9kw | 9kw | 10kw | 1lkw | 20kw |
| B | 4.5kw | bkw | 8kw | 9.5kw | 10kw | llkw | 12kw | 22kw | |
| Control system | PD fully automatic control,single phase | PID fully automatic control,3 phase | |||||||
| Instrumentation | With 0.2 level programmable temperature control instrument,LCD display paperless recorder,digital display cur rent(voltage)meter,etc.,which can be customized according to customer requirements. | ||||||||
| Alarm function | Over-temperature alarm,abnormal situation alarm,etc | ||||||||
Repair The Heating Chamber Of Diffusion Furnace
The core of the semiconductor industry's Rapid Thermal Processing System (FTPS) is a fast-response heating system with MoSi2 heating element.
The FTPS raises the wafer temperature to 100°C/min , cooling rate 60°C/min.
By shortening the temperature rise and stabilization time, FTPS increased the production efficiency.
Since our company was founded in 1998, we have continued to provide a full range of dedicated MoSi2 heating elements for FTPS to many domestic and foreign semiconductor repair companies.
We have mature maintenance technology for Diffusion Furnace used in FTPS.
We can provide heating element replacement services and furnace refurbishment services for different MoSi2 heating elements for FTPS
Repair process
Disassemble
Repair
Reassemble
Yantai Torch Special High Temperature Ceramics Co.,
Ltd
0535-6891306 0535-6891305 
0535-6891307
yttorch@torch-mosi.com
www.torch-mosi.com
No. 9 Xiulin Road, Laishan District, Yantai
City
