Product Information
Product Name | Dedicated type MoSi2 heating elements |
Brand | YTTORCH |
Place Of Origin | CHINA |
Model No | VOS-56-002 for diffusion furnace |
Recommended Temperature Grade Type | MR1800type TC1800 type TC1700type |
Shape | Customizable |
Size | Customizable |
Heating Element Temperature (Air Environment) | 1700℃ |
Features | 1.This product is precision machiningwithhigherheatingpower and itcanprovide uniform thermal field forelectric furnaces; 2.Corresponding shapes can be manufactured basedonoperating requirement of customers.Thisproduct can maintain a certain performance in use with long service life; 3.Comparing with the metal wire,it can bear greater surface load and rapid temperature increasing system(fast coolingand temperature increasing); 4.It can matchwithvarious dimensionsof wafers from small size to large size,namely multi-application 5.It can ensurethecleannessofrelevant equipment if being used underhigh temperature. |
Application Range | Electric furnaces for semiconductor wafers; Cylinder-shaped electric furnaces |
Product Type | Density-g/cm3 | Bending strength under room temperature-MPa | Hardness-GPa | Compression Strength-MPa | Water Absorption-% | Thermal elongation-% |
TC1700 | 5.8±0.1 | 450 | 11 | >1500 | ≤0.2% | 4 |
TC1800 | 6.0±0.1 | 500 | 12 | >1500 | ≤0.2% | 4 |
MR1800 | 5.9±0.1 | 430 | 11.5 | >1500 | ≤0.2% | 4 |
Atmosphere | 1700Type | 1800Type | 1850Type | 1900Type |
Air | 1700 | 1800 | 1830 | 1850 |
Nitrogen | 1600 | 1700 | 1700 | 1700 |
Ar Ne Argon, Helium | 1600 | 1700 | 1700 | 1700 |
Dry Hydrogen (dew point)-80℃ | 1150 | 1150 | 1150 | 1150 |
Wet Hydrogen (dew point)-20℃ | 1450 | 1450 | 1450 | 1450 |
Exogas(e.g. 10% CO2, 50% CO, 15%H2) | 1600 | 1700 | 1700 | 1700 |
Exogas(e.g. 40% CO2, 20% CO) | 1400 | 1450 | 1450 | 1450 |
Cracked and partially burnt ammonia(8%H2) | 1400 | 1450 | 1450 | 1450 |